Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

无人机在输电线路巡检中的多种应用

无人机技术目前的快速发展使得我们国家输电线路自身的巡检能力得到了持续的提升,基于此本文在对无人机技术给予认识的情况下,在了解了输电线路巡检过程中的使用优势之后,还总结了无人机技术在当前我国线路巡检过程中的应用路径以及应用方法;之后使用案例分析的方式分析了无人机技术在当前输电线路巡检过程中的应用方法。     

基于学科竞赛的中医药类院校程序设计课程教学模式的探索

高素质人才培养是我国可持续发展战略、科教兴国战略以及人才强国战略等多项发展战略的一项基础性工程。本文针对中医药类院校程序设计类课程实践教学模式单一等教学实际，以“学科竞赛”为平台，“赛教结合”为理念，以《C语言程序设计》为例，从现存问题、赛教结合模式的引入、建立实施及其评价机制4个方面展开阐述，旨在提高学生学习积极性和能力。     

Comparison of co-current and counter-current flow in a bifunctional reactor containing ammonia synthesis and 2-butanol dehydrogenation to MEK

In this study, a multi-tubular thermally coupled packed bed reactor in which simultaneous production of ammonia and methyl ethyl ketone (MEK) takes place is simulated. The simulation results are presented in two co-current and counter-current flow modes. Based on this new configuration, the released heat from the ammonia synthesis reaction as an extremely exothermic reaction in the inner tube is employed to supply the required heat for the endothermic 2-butanol dehydrogenation reaction in the outer tube. On the other hand, MEK and hydrogen are produced by the dehydrogenation reaction of 2-butanol in the endothermic side, and the produced hydrogen is used to supply a part of the ammonia synthesis feed in the exothermic side. Thus, 30.72% and 31.88% of the required hydrogen for the ammonia synthesis are provided by the dehydrogenation reaction in the co-current and counter-current configurations, respectively. Also, according to the thermal coupling, the required cooler and furnace for the ammonia synthesis and 2-butanol dehydrogenation conventional plants are eliminated, respectively. As a result, operational costs, energy consumption and furnace emissions are considerably decreased. Finally, a sensitivity analysis and optimization are applied to study the effect of the main process parameters variation on the system performance and obtain the minimum hydrogen make-up flow rate, respectively.     

Numerical study of entropy generation in Darcy-Forchheimer (D-F) Bödewadt flow of CNTs

Three-dimensional Bödewadt flow (fluid rotates at a large enough distance from the stationary plate) of carbon nanomaterial is examined. Single walled and multi walled CNTs are dissolved in water and gasoline oil baseliquids. Darcy-Forchheimer porous medium is considered. Stationary disk is further stretched linearly in radial direction. Heat transfer effect is examined in presence of radiation and convection. Effect of viscous dissipation is accounted. Entropy generation rate is studied. By using adequate transformation (von Kármán relations), the flow field equations (PDEs) are transmitted into ODEs. Solutions to these ODEs are constructed via implementation of shooting method (bvp4c). In addition to Entropy generation rate, Bejan number, heat transfer rate (Nusselt number), skin friction and temperature of fluid are examined through involved physical parameters. Axial component of velocity intensifies with increment in nanoparticles volume fraction and ratio of stretching rate to angular velocity parameter while it decays with higher porosity parameter. Higher nanoparticles volume fraction and porosity parameter lead to decay in radial as well as tangential component of velocity. However it enhances with higher ratio of stretching rate to angular velocity parameter. Temperature of fluid directly varies with higher ratio of stretching rate to angular velocity parameter, radiation parameter, Eckert number, Biot number and nanoparticles volume fraction. Rate of Entropy generation is reduced with higher estimations of porosity parameter, nanoparticles volume fraction and radiation parameter. Skin friction coefficient decays with higher porosity parameter and ratio of stretching rate to angular velocity parameter. Intensification in porosity parameter, nanoparticles volume fraction and Biot number leads to higher Nusselt number. Prominent impact is shown by multiple-walled CNTs with gasoline oil basefluid than single-walled CNTs with water basefluid.     

Achieving Rich and Active Alkaline Hydrogen Evolution Heterostructures via Interface Engineering on 2D 1T‐MoS2 Quantum Sheets

Large‐scale production of hydrogen from water‐alkali electrolyzers is impeded by the sluggish kinetics of hydrogen evolution reaction (HER) electrocatalysts. The hybridization of an acid‐active HER catalyst with a cocatalyst at the nanoscale helps boost HER kinetics in alkaline media. Here, it is demonstrated that 1T–MoS₂ nanosheet edges (instead of basal planes) decorated by metal hydroxides form highly active ${\text{edge}}_{{\text{1T‐MoS}}_{\text{2}}}$/ ${\text{edge}}_{\text{Ni}{(\text{OH})}_{\text{2}}}$ heterostructures, which significantly enhance HER performance in alkaline media. Featured with rich ${\text{edge}}_{{\text{1T‐MoS}}_{\text{2}}}$/ ${\text{edge}}_{\text{Ni}{(\text{OH})}_{\text{2}}}$ sites, the fabricated 1T–MoS₂ QS/Ni(OH)₂ hybrid (quantum sized 1T–MoS₂ sheets decorated with Ni(OH)₂ via interface engineering) only requires overpotentials of 57 and 112 mV to drive HER current densities of 10 and 100 mA cm^?2, respectively, and has a low Tafel slope of 30 mV dec^?1 in 1 m KOH. So far, this is the best performance for MoS₂‐based electrocatalysts and the 1T–MoS₂ QS/Ni(OH)₂ hybrid is among the best‐performing non‐Pt alkaline HER electrocatalysts known. The HER process is durable for 100 h at current densities up to 500 mA cm^?2. This work not only provides an active, cost‐effective, and robust alkaline HER electrocatalyst, but also demonstrates a design strategy for preparing high‐performance catalysts based on edge‐rich 2D quantum sheets for other catalytic reactions.     

A review on ultrasonic spot welding of copper alloys

As a solid state joining process, ultrasonic spot welding has been proven to be a promising technique for joining copper alloys. However, challenges still remain in employing ultrasonic spot welding to join copper alloys. This article comprehensively reviews the current state of ultrasonic spot welding of copper alloys with a number of critical issues including materials flow, plastic deformation, temperature distribution, vibration, relative motion, vertical displacement, interface friction coefficient, online monitoring technique, coupled with the macrostructure and microstructure, the mechanical properties and electrical conductivity. In addition, the future trends in this field are provided.     

柠檬酸铋合成新工艺研究

针对现有柠檬酸铋制备工艺合成时间长、能耗高、产品纯度不高等不足,介绍了一种常温下制备柠檬酸铋的新工艺。新工艺制备时间短,制备的柠檬酸铋产品质量好,合成过程产生的废水可循环利用,废气经碱液循环吸收可生产硝酸钠副产品。     

Integrated circuit and system design for renewable energy inverters

This study proposes that a novel integrated circuit (IC) and system design for renewable energy inverters can harvest renewable energy to power direct current (DC) and alternating current (AC) loads. In addition, an intelligent synthesis and management tool is developed to design the proposed system and to judge the system’s operational maintenance decisions. Finally, a renewable energy inverter’s information is posted to an online system. Users can obtain the proposed system’s information at any time and place. The accurate and superior performance of the proposed IC and system is confirmed by computer simulations and experimental results.     

Accounting for the uncertainties in the estimation of average shear wave velocity using V S– N correlations

Site-specific seismic hazard analysis is crucial for designing earthquake resistance structures, particularly in seismically active regions. Shear wave velocity ( V _S) is a key parameter in such analysis, although the economy and other factors restrict its direct field measurement in many cases. Various V _S–SPT– N correlations are routinely incorporated in seismic hazard analysis to estimate the value of V _S. However, many uncertainties question the reliability of these estimated V _S values. This paper comes up with a statistical approach to take care of such uncertainties involved in V _S calculations. The measured SPT– N values from all the critical boreholes were converted into statistical parameters and passed through various correlations to estimate V _S at different depths. The effect of different soil layers in the boreholes on the Vs estimation was also taken into account. Further, the average shear wave velocity of the top 30 m soil cover ( V _S30) is estimated after accounting for various epistemic and aleatoric uncertainties. The scattering nature of the V _S values estimated using different V _S– N correlations was reduced significantly with the application of the methodology. Study results further clearly demonstrated the potential of the approach to eliminate various uncertainties involved in the estimation of V _S30 using general and soil-specific correlations.